- Measurement
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자동면저항측정기
자동면저항측정기
HOME > Measurement > 자동면저항측정기견적문의
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대면적 글라스 및 필름 스테이지용 면저항측정기
- 주요기능
- 1) XYRZ-Axis robot fully automatic moving system
- 2) Automatic resistance range selection
- 3) Measuring size (Circular type) : Max : Ø500 ㎜ (option ~ )
- 4) Perfect remote control by operation software
- 5) Data analysis : uniformity, avg, max, min, 2D 3D-mapping, capture. etc
Measuring method 4-Point Probe Configuration Sngle or dual Measuring Range 1mΩ/sq. ~ 1GΩ/sq. , 10.0 μΩ·㎝ ~ 10.0 MΩ·㎝ Measurement accuracy ±0.5% (KRISS Standard wafer, when 23℃) Measuring time range search max. 3s / search after actual 1-2s 4-Point Probe pin spacing 1.00㎜ Pin load 80~160g/pin Pin radius 300㎛ Tolerance ±0.01㎜ Pin material tngsten
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